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Wafer Laser Marking System HDZ-WAF600
Laser marking is widely used in the semiconductor industry due to its apparent advantages such as high marking accuracy, fast speed, and permanent marking.
Wafer marking on the die with good marking quality, high cleanliness levels, ensure the traceability and reliability.
Features
● Automatically wafer pick-up from the magazine
● Finding wafer automatically with edge seeker
● Automatic positioning marking with the visual system
● The visual inspection system is available
● Available to mark on the backside of the wafer through the transmittance film
● Comply with customer MES data
● SMIF and other automatic loading and unloading modules are selectable
● UV and Green laser modules can be selected upon to the demand
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Wafer Laser Marking System HDZ-WAF600
Laser marking is widely used in the semiconductor industry due to its apparent advantages such as high marking accuracy, fast speed, and permanent marking.
Wafer marking on the die with good marking quality, high cleanliness levels, ensure the traceability and reliability.
Features
● Automatically wafer pick-up from the magazine
● Finding wafer automatically with edge seeker
● Automatic positioning marking with the visual system
● The visual inspection system is available
● Available to mark on the backside of the wafer through the transmittance film
● Comply with customer MES data
● SMIF and other automatic loading and unloading modules are selectable
● UV and Green laser modules can be selected upon to the demand
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Application and Samples
Apply to 6-inch, 8-inch, 12-inch wafer front or back marking.
Options and Accessories
SMIF and other automatic loading and unloading modules are selectable.
Technical Specs
| Laser Type | UV Laser |
| Wavelength | 355 nm |
| Min Beam Diameter | < 10 µm |
| Beam Quality M2 | < 1.2 |
| Pulse Frequency | 10 - 200 kHz |
| Output Power | 10 Watts |
| Repetition Accuracy | 2 μm |
| Cooling System | Water-cooled |
| Fθ Marking Field Size |
1.96" x 1.96" (50mm x 50mm) |
| X, Y travel Distance | 15.74" x 11.81"(400mm x 300 mm) |
| Laser Safety Level | Class I |
| Electrical Connection |
110 - 230 V (± 10%) 20 A, 50/60 Hz |
| Power Consumed | 5 Kw |
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Warranty Coverage (Parts & Labor) |
1-year |
| Laser Safety Compliance | FDA(CDRH) |
| Running Temperature |
15℃-35℃ / 59°-95°F |
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