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Wafer Laser Marking System
Wafer laser marking machine.
Laser marking is widely used in the semiconductor industry due to its apparent advantages such as high marking accuracy, fast speed, and permanent marking.
Wafer marking on the die with good marking quality, high cleanliness levels, ensure the traceability and reliability.
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Laser marking is widely used in the semiconductor industry due to its apparent advantages such as high marking accuracy, fast speed, and permanent marking.
Wafer marking on the die with good marking quality, high cleanliness levels, ensure the traceability and reliability.
Features
A laser is used to print the lot number (such as ABC1234) of the wafer directly above the wafer to ensure the traceability of the entire process chain. This lot number is arranged by many recessed holes, a byproduct of marking It will accumulate around the pits. Excessive or hard protrusions may scratch the surface of the wafer in the later process and cause the wafer to be scrapped. Ultraviolet laser processing is a cold processing method that can better solve the problem of accumulation. It is an ideal wafer marking program.
- Automatically wafer pick-up from the magazine
- Finding wafer automatically with edge seeker
- Automatic positioning marking with the visual system
- The visual inspection system is available
- Available to mark on the backside of the wafer through the transmittance film
- Comply with customer MES data
- SMIF and other automatic loading and unloading modules are selectable
- UV and Green laser modules can be selected upon to the demand
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Application and Samples
6-inch, 8-inch, 12-inch wafer front or back marking
Technical Specs
| Laser Type | UV Laser |
| Wavelength | 355 nm |
| Min Beam Diameter | < 10 µm |
| Beam Quality M2 | < 1.2 |
| Pulse Frequency | 10 - 200 kHz |
| Output Power | 10 Watts |
| Repetition Accuracy | 2 μm |
| Cooling System | Water-cooled |
| Fθ Marking Field Size | 1.96" x 1.96" (50mm x 50mm) |
| X, Y travel Distance | 15.74" x 11.81" (400mm x 300 mm) |
| Laser Safety Level | Class I |
| Electrical Connection | 110 - 230 V (± 10%) 20 A, 50/60 Hz |
| Power Consumed | 5 Kw |
| Warranty Coverage(Parts & Labor) | 1-year |
| Laser Safety Compliance | FDA(CDRH) |
| Running Temperature | 15℃-35℃ / 59°-95°F |
Options and Accessories
SMIF, other automatic loading and unloading modules
ABOUT HAN'S LASER CORPORATION
Han's Laser Corporation is a wholly owned subsidiary of Han's Laser Technology Group, a global leader in laser technology.
We are committed to providing our customers with the latest industrial laser machine technology to better suit their special needs.
Headquartered in the U.S. employed by knowledgeable trained personnel. Han's Laser is transforming the industry into a state of the art machines.
Technology Industry Group Co., Ltd, a public company that is established in 1996 has now become the flagship of Chinese national laser industry and the world's famous laser
equipment manufacturer. Han's Laser went public in Shenzhen Stock Exchange Market in 2004. And as of today, its market value reaches more than 6 Billion USD.
We are committed to providing our customers with the latest industrial laser machine technology to better suit their special needs.
Headquartered in the U.S. employed by knowledgeable trained personnel. Han's Laser is transforming the industry into a state of the art machines.
Technology Industry Group Co., Ltd, a public company that is established in 1996 has now become the flagship of Chinese national laser industry and the world's famous laser
equipment manufacturer. Han's Laser went public in Shenzhen Stock Exchange Market in 2004. And as of today, its market value reaches more than 6 Billion USD.
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The global leader in laser technology
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