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Wafer Laser Marking System
Wafer Laser Marking System
Wafer Laser Marking System
Wafer Laser Marking System
Wafer laser marking machine.
Laser marking is widely used in the semiconductor industry due to its apparent advantages, such as high marking accuracy, fast speed, and permanent marking.
Wafer marking on the die requires good marking quality. High cleanliness levels will ensure traceability and reliability.
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A laser is used to print the lot number (such as ABC1234) directly above the wafer to ensure the entire process chain's traceability. This lot number is composed of many recessed holes. There may be some derivatives after marking, which will accumulate around the pits. Excessive or hard protrusions may scratch the wafer's surface in the later process and cause the wafer to be scrapped. Ultraviolet laser processing is a cold processing method that solves accumulation, making it an ideal wafer marking program.
- Automatic wafer pick-up from the magazine
- Finding wafers automatically with edge seeker 
- Automatic positioning marking with the visual system
- The visual inspection system is available
- Available to mark on the backside of the wafer through the transmittance film 
- Complies with the SMEMA standard
- SMIF and other automatic loading and unloading modules can be selected as an extension
- UV and Green laser modules can be selected upon to the demand
Application and Samples
6-inch, 8-inch, 12-inch wafer front or back marking
Technical Specs
Laser Type UV Laser
Wavelength 355 nm 
Min Beam Diameter  < 10 µm
Beam Quality M2 < 1.2
Pulse Frequency 10 - 200 kHz
Output Power 10 Watts
Repetition Accuracy 2 μm
Cooling System Water-cooled
Fθ Marking Field Size 1.96" x 1.96" (50mm x 50mm)
X, Y travel Distance 15.74" x 11.81" (400mm x 300 mm)
Laser Safety Level Class I
Electrical Connection 110 - 230 V (± 10%) 20 A, 50/60 Hz
Power Consumed 5 Kw
Warranty Coverage 1-year
Laser Safety Compliance FDA(CDRH)
Running Temperature 15℃-35℃ / 59°-95°F

Options and Accessories
SMIF, other automatic loading and unloading modules
Han's Laser Corporation is a wholly-owned subsidiary of Han's Laser Technology Group, a global industrial laser technology leader.
We are committed to providing our customers with the latest industrial laser machine technology to suit their particular needs better.
Headquartered in the U.S., employed by knowledgeable, trained personnel. Han's Laser is transforming the industry with our state-of-the-art machines.
Han's Laser Technology Industry Group Co., Ltd, a public company established in 1996, has become the Chinese national laser industry's flagship and one of the world's most famous laser equipment manufacturers. Han's Laser went public in Shenzhen Stock Exchange Market in 2004. And as of today, its market value reaches more than 7 Billion USD.